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Untersuchungen zum Reaktionsverhalten kristalliner Siliziumoberflächen in HF-basierten Ätzlösungen

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Bibliographic Details
Dissertation Note: Freiberg, TU Bergakademie, Diss., 2009
Type of Resource: Book Thesis
Language: German
published:
2009
Subjects:
Source: Verbunddaten SWB
Subject: DK 546.28
DK 621.794.4
DK 539.211
DK 378.245
Call number: 09.4931 4.