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Growth of ScN and AlScN by reactive sputter epitaxy

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Published in: Verhandlungen der Deutschen Physikalischen Gesellschaft year:2023; (2023), Artikel-ID HL 51.7; elocationid:HL 51.7
Authors and Corporations: Hörich, Florian (Author), Lüttich, Christopher (Author), Borgmann, Ralf (Author), Bläsing, Jürgen (Author), Strittmatter, André (Author), Dadgar, Armin (Author)
Other Authors: Lüttich, Christopher [Author] • Borgmann, Ralf [Author] • Bläsing, Jürgen [Author] • Strittmatter, André [Author] • Dadgar, Armin [Author]
Type of Resource: E-Book Component Part
Language: English
published:
2023
Series: Deutsche Physikalische Gesellschaft: Verhandlungen der Deutschen Physikalischen Gesellschaft, (2023), Artikel-ID HL 51.7
Source: Verbunddaten SWB
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