APA Citation

Journal of vacuum science & technology: JVST ; the official journal of the American Vacuum Society. New York, NY: Inst.

ISBD Citation

Journal of vacuum science & technology : JVST ; the official journal of the American Vacuum Society / publ. by the American Institute of Physics . — New York, NY : Inst. — Online-Ressource

MLA Citation

Journal of Vacuum Science & Technology: JVST ; the Official Journal of the American Vacuum Society.New York, NY: Inst.

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