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Journal of vacuum science & technology: JVST ; the official journal of the American Vacuum Society, B Microelectronics and nanometer structures processing, measurement and phenomen...

Bibliographic Details
Previous Title: Vorg.: Journal of vacuum science & technology
Authors and Corporations: American Vacuum Society (Issuing body)
Type of Resource: Electronic Journal
Language: English
New York, NY Inst. 1983-
Source: Verbunddaten SWB
ISSN: 2327-9877