APA Citation

Schumacher, P. (2019). Realization of ion mass and energy selected hyperthermal ion-beam assisted deposition of thin, epitaxial nitride films: Characterization and application.

ISBD Citation

Realization of ion mass and energy selected hyperthermal ion-beam assisted deposition of thin, epitaxial nitride films : Characterization and application . — 2019

MLA Citation

Schumacher, Philipp. Realization of Ion Mass and Energy Selected Hyperthermal Ion-beam Assisted Deposition of Thin, Epitaxial Nitride Films: Characterization and Application.2019.

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