Realization of ion mass and energy selected hyperthermal ion-beam assisted deposition of thin, epitaxial nitride films: characterization and application

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Bibliographic Details

Authors and Corporations:	Schumacher, Philipp
Dissertation Note:	Dissertation, Universität Leipzig, 2019
Type of Resource:	E-Book
Language:	German
Subjects:	molecular beam epitaxy thin film deposition ion beam assisted deposition Hochschulschrift molecular beam epitaxy thin film deposition ion beam assisted deposition
Source:	Qucosa