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Realization of ion mass and energy selected hyperthermal ion-beam assisted deposition of thin, epitaxial nitride films: characterization and application

Bibliographic Details
Authors and Corporations: Schumacher, Philipp
Dissertation Note: Dissertation, Universität Leipzig, 2019
Type of Resource: E-Book
Language: German
Subjects:
molecular beam epitaxy
thin film deposition
ion beam assisted deposition
Hochschulschrift
molecular beam epitaxy
thin film deposition
ion beam assisted deposition
Source: Qucosa
Table of Contents:
  • 1. Introduction 2. Ion-beam assisted deposition (IBAD) 3. The quadrupole mass filter system 4. Experimental Methods 5. Application of energy and mass selected ion-beam assisted deposition 6. Conclusion and Outlook