Cavitation Bubble Dynamics during Laser Wet Etching of Transparent Sapphire Substrates by 1064 nm La...

Bibliographic Details
Journal Title: Journal of Laser Micro/Nanoengineering
Authors and Corporations: Xie, X.Z.
In: Journal of Laser Micro/Nanoengineering, 8, 2013, 3, p. 259-265
Type of Resource: E-Article
Language:Undetermined
published:
Japan Laser Processing Society
Subjects: