TY - JOUR TI - Cavitation Bubble Dynamics during Laser Wet Etching of Transparent Sapphire Substrates by 1064 nm Laser Irradiation T2 - Journal of Laser Micro/Nanoengineering VL - 8 IS - 3 SP - 259 EP - 265 AU - Xie, X.Z. PB - Japan Laser Processing Society PY - 2013 PY - 2013 LA - Undetermined KW - Electrical and Electronic Engineering KW - Industrial and Manufacturing Engineering KW - Instrumentation SN - 1880-0688 UR - http://dx.doi.org/10.2961/jlmn.2013.03.0012 UR - https://katalog.ub.tu-freiberg.de/Record/ai-49-aHR0cDovL2R4LmRvaS5vcmcvMTAuMjk2MS9qbG1uLjIwMTMuMDMuMDAxMg ER -