Twin Gas Jet-assisted Pulsed Green Laser Scribing of Sapphire Substrate

Bibliographic Details
Journal Title: Journal of Laser Micro/Nanoengineering
Authors and Corporations: Xie, X.Z.
In: Journal of Laser Micro/Nanoengineering, 11, 2016, 2, p. 170-178
Type of Resource: E-Article
Language:Undetermined
published:
Japan Laser Processing Society
Subjects: