TY - JOUR TI - High-Efficiency Sub-Micrometer Multi-Beam Interference Structuring for Large-Scale Surface Using Ultrashort Laser Pulses T2 - Journal of Laser Micro/Nanoengineering PB - Japan Laser Processing Society PY - 2019 PY - 2019 LA - Undetermined KW - Electrical and Electronic Engineering KW - Industrial and Manufacturing Engineering KW - Instrumentation SN - 1880-0688 UR - http://dx.doi.org/10.2961/jlmn.2019.01.0016 UR - https://katalog.ub.tu-freiberg.de/Record/ai-49-aHR0cDovL2R4LmRvaS5vcmcvMTAuMjk2MS9qbG1uLjIwMTkuMDEuMDAxNg ER -